Widely tunable lasers using MEMS gratings and mirrors

Xuming Zhang, J. Li, D. Y. Tang, Chao Lu, A. Q. Liu

Research output: Journal article publicationConference articleAcademic researchpeer-review


Tunable lasers have wide applications in DWDM systems to save inventory cost and to improve the optical network functionalities. The Microelectromechanical Systems (MEMS) technology has shown strong promise to miniaturize the conventional mechanical tunable lasers with adding merits of high compactness, high speed, batch production and so on. In this paper, external cavity tunable diode lasers using MEMS movable mirrors and rotary gratings as the external reflectors are presented. One tunable laser of 2 mm × 1.5 mm is formed by integration of a surface-micromachined 3D mirror with a diode laser and an optical fiber. In addition, deep-etched structures such rotary gratings, circular mirror, microlens, and grooves for diode laser and fiber are illustrated to form widely tunable lasers.
Original languageEnglish
Pages (from-to)188-194
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1 Jan 2003
Externally publishedYes
EventMOEMS and Miniaturized Systems III - San Jose, CA, United States
Duration: 27 Jan 200329 Jan 2003


  • Blazed grating
  • DWDM
  • External-cavity tunable laser
  • Optical MEMS
  • Tunable laser

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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