WDM micromachined tunable laser

Xuming Zhang, A. Q. Liu, Chao Lu, D. Y. Tang

Research output: Journal article publicationConference articleAcademic researchpeer-review


An integrated MEMS tunable laser of ∼ 2 mm × 1.5 mm size is demonstrated in this paper. The tunable laser is formed by the integration of a surface-micromachined 3D micromirror with a Fabry-Perot laser diode and an optical fiber. The micromirror can be driven to translate by a comb drive to change the external cavity length of laser diode, enabling the wavelength tuning. A tunable range of 16 nm is obtained, which covers 20 channels of WDM systems spaced by 100GHz. The three-mirror Fabry-Perot cavity model is modified to explain the continuous wavelength change as well as the mode hopping. An array of the tunable laser is potential to supply light sources for multiple channels of WDM systems.
Original languageEnglish
Pages (from-to)106-111
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1 Dec 2001
Externally publishedYes
EventOptical Switching and Optical Interconnection - Beijing, China
Duration: 12 Nov 200115 Nov 2001


  • All-optical network (AON)
  • MEMS
  • Tunable laser
  • Wavelength division multiplexing (WDM)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics


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