Abstract
We have fabricated, modeled and tested a displacement sensor based on an external cavity laser with a micro-mirror integrated with a positioning actuator. We have developed an improved model for simulating the intensity change in the external cavity laser when the feedback from the external mirror exceed 20% of the feedback from the laser facet. A special surface-micromachined mirror has been developed to obtain a very short external cavity laser (≈10μm) that allow removing all coupling optical elements in the external cavity. During testing, we could verify the theoretical prediction and achieve a large relative feedback providing a strong intensity modulation. We observed a good angular tolerance suggesting a good manufacturability of the device. The tested device has a noise floor at 5pm/Hz above 500Hz. This sensor could be used as a high sensitivity acceleration sensor.
| Original language | English |
|---|---|
| Pages (from-to) | 232-240 |
| Number of pages | 9 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 116 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 15 Oct 2004 |
| Externally published | Yes |
Keywords
- Accelerometer
- Displacement sensor
- External-cavity laser
- Interferometer
- Large range
- Laser feedback
- Micromachining
- MOEMS
- Self-mixing
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering