Vibration measurement with a micromachined mirror in a very-short external cavity laser

Franck Chollet, Gopal M. Hegde, Xuming Zhang, Liu Aiqun, Anand Asundi

Research output: Journal article publicationJournal articleAcademic researchpeer-review

10 Citations (Scopus)


We have fabricated, modeled and tested a displacement sensor based on an external cavity laser with a micro-mirror integrated with a positioning actuator. We have developed an improved model for simulating the intensity change in the external cavity laser when the feedback from the external mirror exceed 20% of the feedback from the laser facet. A special surface-micromachined mirror has been developed to obtain a very short external cavity laser (≈10μm) that allow removing all coupling optical elements in the external cavity. During testing, we could verify the theoretical prediction and achieve a large relative feedback providing a strong intensity modulation. We observed a good angular tolerance suggesting a good manufacturability of the device. The tested device has a noise floor at 5pm/Hz above 500Hz. This sensor could be used as a high sensitivity acceleration sensor.
Original languageEnglish
Pages (from-to)232-240
Number of pages9
JournalSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - 15 Oct 2004
Externally publishedYes


  • Accelerometer
  • Displacement sensor
  • External-cavity laser
  • Interferometer
  • Large range
  • Laser feedback
  • Micromachining
  • Self-mixing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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