Vertical split-ring resonator based metasurface for light manipulation

Mu Ku Chen, Wei Lun Hsu, Pin Chieh Wu, Jia Wern Chen, Ting Yu Chen, Wei Ting Chen, Yao Wei Huang, Chun Yen Liao, Greg Sun, Din Ping Tsai

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review


Metasurfaces have unusual abilities to manipulate light with artificial metal nanostructures that are patterned on surfaces of different media. Limited by nanofabrication difficulties, most reported works have been based on 2D metal structures. We have developed an advanced e-beam process that allowed for the deposition of 3D nanostructures which called vertical split-ring resonators (VSRRs). VSRR opens another degree of freedom in the metasurface design. Here we explore the functionality of beam steering with phase modulation by tuning only the vertical dimension of the VSRRs and show that anomalous steering reflection of a wide range of angles can be accomplished with high extinction ratio using the finite-difference-time-domain simulation. We also demonstrate that metasurfaces made of 3D VSRRs can be made with roughly half of the footprint compared to that of 2D nano-rods, enabling high density integration of metal nanostructures.

Original languageEnglish
Title of host publicationFrontiers in Optics, FiO 2016
PublisherOSA - The Optical Society
ISBN (Print)9781943580194
Publication statusPublished - 21 Jul 2014
Externally publishedYes
EventFrontiers in Optics, FiO 2016 - Rochester, United States
Duration: 17 Oct 201621 Oct 2016

Publication series

NameOptics InfoBase Conference Papers


ConferenceFrontiers in Optics, FiO 2016
Country/TerritoryUnited States

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials


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