Variable nano-grating for tunable filters

Xuming Zhang; Q. W. Zhao; T. Zhong; A. B. Yu; E. H. Khoo; Chao Lu; A. Q. Liu

doi:10.1109/SENSOR.2007.4300658

Variable nano-grating for tunable filters

Xuming Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, Chao Lu, A. Q. Liu

The Hong Kong Polytechnic University

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

12 Citations (Scopus)

Abstract

This paper presented the design of subwavelength grating (i.e., nano-grating) for narrow-band and wide-band filter applications. The grating period can be tuned from 700 nm to 1140 nm by a rhombic-shaped thermal actuator array with a driving current of 2.7 mA, achieving a change of transmissivity by 13 dB due to the guided mode resonance. Wide-band of filtering can be obtained by use of another fixed-period grating to compensate the dispersion. Such grating design makes it practical to implement many tunable nano-optical devices.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	2417-2420
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300658
Publication status	Published - 1 Dec 2007
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

Microelectromechanical systems (MEMS)
Nano-optics
Subwavelength grating
Thermal actuator
Tunable filter

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

More information

10.1109/SENSOR.2007.4300658

Cite this

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title = "Variable nano-grating for tunable filters",

abstract = "This paper presented the design of subwavelength grating (i.e., nano-grating) for narrow-band and wide-band filter applications. The grating period can be tuned from 700 nm to 1140 nm by a rhombic-shaped thermal actuator array with a driving current of 2.7 mA, achieving a change of transmissivity by 13 dB due to the guided mode resonance. Wide-band of filtering can be obtained by use of another fixed-period grating to compensate the dispersion. Such grating design makes it practical to implement many tunable nano-optical devices.",

keywords = "Microelectromechanical systems (MEMS), Nano-optics, Subwavelength grating, Thermal actuator, Tunable filter",

author = "Xuming Zhang and Zhao, {Q. W.} and T. Zhong and Yu, {A. B.} and Khoo, {E. H.} and Chao Lu and Liu, {A. Q.}",

year = "2007",

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doi = "10.1109/SENSOR.2007.4300658",

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note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",

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Zhang, X, Zhao, QW, Zhong, T, Yu, AB, Khoo, EH, Lu, C & Liu, AQ 2007, Variable nano-grating for tunable filters. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300658, pp. 2417-2420, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300658

Variable nano-grating for tunable filters. / Zhang, Xuming; Zhao, Q. W.; Zhong, T. et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 2417-2420 4300658.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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T1 - Variable nano-grating for tunable filters

AU - Zhang, Xuming

AU - Zhao, Q. W.

AU - Zhong, T.

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AU - Lu, Chao

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AB - This paper presented the design of subwavelength grating (i.e., nano-grating) for narrow-band and wide-band filter applications. The grating period can be tuned from 700 nm to 1140 nm by a rhombic-shaped thermal actuator array with a driving current of 2.7 mA, achieving a change of transmissivity by 13 dB due to the guided mode resonance. Wide-band of filtering can be obtained by use of another fixed-period grating to compensate the dispersion. Such grating design makes it practical to implement many tunable nano-optical devices.

KW - Microelectromechanical systems (MEMS)

KW - Nano-optics

KW - Subwavelength grating

KW - Thermal actuator

KW - Tunable filter

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Y2 - 10 June 2007 through 14 June 2007

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Variable nano-grating for tunable filters

Abstract

Conference

Keywords

ASJC Scopus subject areas

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