Variable nano-grating for tunable filters

Xuming Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, Chao Lu, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

12 Citations (Scopus)

Abstract

This paper presented the design of subwavelength grating (i.e., nano-grating) for narrow-band and wide-band filter applications. The grating period can be tuned from 700 nm to 1140 nm by a rhombic-shaped thermal actuator array with a driving current of 2.7 mA, achieving a change of transmissivity by 13 dB due to the guided mode resonance. Wide-band of filtering can be obtained by use of another fixed-period grating to compensate the dispersion. Such grating design makes it practical to implement many tunable nano-optical devices.
Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2417-2420
Number of pages4
DOIs
Publication statusPublished - 1 Dec 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 10 Jun 200714 Jun 2007

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/TerritoryFrance
CityLyon
Period10/06/0714/06/07

Keywords

  • Microelectromechanical systems (MEMS)
  • Nano-optics
  • Subwavelength grating
  • Thermal actuator
  • Tunable filter

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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