UV annealing of inorganic-organic composite films prepared by sol-gel technique

X.Y. Zhang, Wei Chen, Z.M. Wang, J.Y. Zhang, I.W. Boyd

Research output: Journal article publicationConference articleAcademic researchpeer-review

7 Citations (Scopus)


SiO2/MC (Methylcellulose) composite materials formed by the sol-gel technique were investigated for optical applications. MC was used as an organic binder to get a thicker film by a single spin-coating process. After spin-coating and placement in air, a uniform single coating layer with a thickness of approximately 900 nm was obtained. The films were annealed in 0.2 bar O2 ambiance under the irradiation of 222 nm excimer UV (ultraviolet) lamps at temperatures from room temperature to 300 °C. The film properties were studied by scanning electron microscopy, thermal gravimetric analysis, Fourier-transform infrared spectroscopy, UV-VIS spectrophotometry, and X-ray photoelectron spectroscopy. Absorption feature approximately 2900 cm-1 in FTIR spectra, corresponding to some organic compounds, was found to disappear after UV annealing at low temperatures, indicating active oxygen species produced by UV light can enhance the removal of the organic compounds in the films. This UV annealing technique can be applicable to other optical and electrical materials. © 2003 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)59-62
Number of pages4
JournalThin Solid Films
Publication statusPublished - 1 Apr 2004
Externally publishedYes
EventProceedings of Symposium H on Photonic Processing of Surfaces - Strasbourg, France
Duration: 10 Jun 200313 Jun 2003


  • Excimer lamp
  • Methylcellulose
  • SiO2
  • Sol-gel process
  • UV annealing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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