Ultrastable absolute-phase common-path optical profiler based on computer-generated holography

Nicolas B.E. Sawyer, Jason Y.L. Goh, Matthew Clark, Michael Geoffrey Somekh

Research output: Journal article publicationJournal articleAcademic researchpeer-review

10 Citations (Scopus)

Abstract

A new scanning common-path interferometric profiler capable of absolute-phase measurement is described. The key element is a computer-generated hologram, which acts as the beam-splitting element. Unlike most absolute phase systems, it can be made entirely common path with respect to piston microphonics and is thus exceptionally stable. In addition to operating in scanning mode, the optical configuration permits simultaneous operation as a single-shot phase measuring interferometer and is thus capable of simultaneous form and texture measurements. The operation and stability of the scanning profiler are demonstrated experimentally.
Original languageEnglish
Pages (from-to)6716-6720
Number of pages5
JournalApplied Optics
Volume37
Issue number28
DOIs
Publication statusPublished - 1 Oct 1998
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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