Ultraminiature Optical Fiber Accelerometer Based on a 3D Microprinted Proof Mass-Integrated Fabry-Pérot Microinterferometer

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

We present an ultraminiature optical fiber accelerometer based on a micrometer-scale fiber-top Fabry-Pérot (FP) microinterferometer. An in-situ 3D microprinting technology is applied to directly print a proof mass-integrated FP microinterferometer on the end face of a single-mode optical fiber. The acceleration-induced change in the cavity length of the FP microinterferometer is demodulated by a laser interferometric readout scheme. Experimental results revealed that such an ultraminiature optical fiber optomechanical accelerometer can achieve not only a wide bandwidth with a flat frequency response of up to 10 kHz but also a low limit of detection, i.e., a noise-equivalent acceleration of 145.05 μg/√Hz.

Original languageEnglish
Title of host publication29th International Conference on Optical Fiber Sensors
EditorsJose Luis Santos, Manuel Lopez-Amo Sainz, Tong Sun
PublisherSPIE
ISBN (Electronic)9781510691872
DOIs
Publication statusPublished - 22 May 2025
Event29th International Conference on Optical Fiber Sensors - Porto, Portugal
Duration: 25 May 202530 May 2025

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume13639
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference29th International Conference on Optical Fiber Sensors
Country/TerritoryPortugal
CityPorto
Period25/05/2530/05/25

Keywords

  • 3D microprinting
  • Fabry-Pérot (FP) microinterferometer
  • Optical fiber accelerometer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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