Ultra-precision machining technique for optical free-surface and its application

光学自由曲面是指非对称性、不规则、不适合用统一的光学方程式来描述的光学曲面。自由曲面光学元件在光电产品及光通讯产品中的应用日益广泛。采用多轴超精密金刚石机床加工光学自由曲面 ,可达到亚微米级形状精度和纳米级表面粗糙的高精度水平。文章介绍了光学自由曲面的超精密加工技术及其在光电产品领域的应用 ,并开发适合几种典型光学自由曲面超精密加工的刀具轨迹自动生成软件||Free surface optical products are crucial to the development of complex and micro optical electro mechanical devices used in many photonics products. The fabrication of high quality optical freeform lens is based on ultra precision free surface machining technology on multi axes ultra precision diamond machine, which allows direct machining of freeform surfaces with sub micrometric form accuracy and nanometric surface finish. In this paper, the app. of ultra precision free surface machining to the fabrication of optical products is addressed. The methodologies for the development of the tool path generating software for three optical products are discussed.ecisionMachiningTe 还原