@inproceedings{9a4fb803b3b647f98a65ee967dbc867d,
title = "Ultra-high coupling efficiency of MEMS tunable laser via 3-dimensional micro-optical coupling system",
abstract = "This paper reports a 3-dimensional (3D) micro-optical coupling system for improving coupling efficiency in the Littrow configured micro-electro-mechanical system (MEMS) tunable lasers. In the coupling system, an optical fiber acts as a rod lens for light convergence in the vertical plane, while a deep-etched silicon parabolic mirror confines the light in the horizontal plane. Compared with previous MEMS lasers without any light focusing or only one-directional focusing mechanism, the proposed 3D micro-optical system allows longer external cavity length and provides higher coupling efficiency. A prototype is fabricated on a SOI-wafer with an etching depth of 100 μm. The laser obtains a coupling efficiency as high as 76.5%, which is much higher than typical value of 3% - 50% in previous designs. The laser has dimensions as small as 3 mm × 3.2 mm in single-chip integration. It achieves large tuning range of 48.3 nm within 1 ms tuning speed.",
author = "Tao, {J. F.} and Yu, {A. B.} and H. Cai and Zhu, {W. M.} and Zhang, {Q. X.} and J. Wu and K. Xu and Lin, {J. T.} and Liu, {A. Q.}",
year = "2011",
month = jan,
doi = "10.1109/MEMSYS.2011.5734350",
language = "English",
isbn = "9781424496327",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "13--16",
booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011",
note = "24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",
}