Two-step interfacial reaction of HfO2 high-k gate dielectric thin films on Si

Jiyan Dai; P.F. Lee; H.L.W. Chan; C.L. Choy

Two-step interfacial reaction of HfO2 high-k gate dielectric thin films on Si

Jiyan Dai, P.F. Lee, H.L.W. Chan, C.L. Choy

Research output: Unpublished conference presentation (presented paper, abstract, poster) › Conference presentation (not published in journal/proceeding/book) › Academic research › peer-review

Original language	English
Publication status	Published - 2003
Event	International Conference on Materials for Advanced Technologies [ICMAT]\|\|International Union of Materials Research Societies - International Conference in Asia [IUMRS-ICA] - Duration: 1 Jan 2003 → …

Conference

Conference	International Conference on Materials for Advanced Technologies [ICMAT]\|\|International Union of Materials Research Societies - International Conference in Asia [IUMRS-ICA]
Period	1/01/03 → …

Cite this

@conference{28295e7db9fc406ba04e2f7e5817b6ba,

title = "Two-step interfacial reaction of HfO2 high-k gate dielectric thin films on Si",

author = "Jiyan Dai and P.F. Lee and H.L.W. Chan and C.L. Choy",

year = "2003",

language = "English",

note = "International Conference on Materials for Advanced Technologies [ICMAT]||International Union of Materials Research Societies - International Conference in Asia [IUMRS-ICA] ; Conference date: 01-01-2003",

}

Two-step interfacial reaction of HfO2 high-k gate dielectric thin films on Si. / Dai, Jiyan; Lee, P.F.; Chan, H.L.W. et al.
2003. Paper presented at International Conference on Materials for Advanced Technologies [ICMAT]||International Union of Materials Research Societies - International Conference in Asia [IUMRS-ICA].

Research output: Unpublished conference presentation (presented paper, abstract, poster) › Conference presentation (not published in journal/proceeding/book) › Academic research › peer-review

TY - CONF

T1 - Two-step interfacial reaction of HfO2 high-k gate dielectric thin films on Si

AU - Dai, Jiyan

AU - Lee, P.F.

AU - Chan, H.L.W.

AU - Choy, C.L.

PY - 2003

Y1 - 2003

M3 - Conference presentation (not published in journal/proceeding/book)

T2 - International Conference on Materials for Advanced Technologies [ICMAT]||International Union of Materials Research Societies - International Conference in Asia [IUMRS-ICA]

Y2 - 1 January 2003

ER -