Two-dimensional photonic-crystal-based Fabry-Perot etalon

Chong Pei Ho, Prakash Pitchappa, Piotr Kropelnicki, Jian Wang, Hong Cai, Yuandong Gu, Chengkuo Lee

Research output: Journal article publicationJournal articleAcademic researchpeer-review

20 Citations (Scopus)


We demonstrate the design, fabrication, and characterization of a polycrystalline-silicon-based photonic crystal Fabry- Perot etalon, which is aimed to work in the mid-infrared wavelengths. The highly reflective mirrors required in a Fabry-Perot etalon are realized by freestanding polycrystalline- silicon-based photonic crystal membranes with etched circular air holes. A peak reflection of 96.4% is observed at 3.60 μm. We propose a monolithic CMOS-compatible fabrication process to configure two such photonic crystal mirrors to be in parallel to form a Fabry-Perot etalon; a filtered transmission centered at 3.51 μm is observed. The quality factor measured is around 300, which is significantly higher than in existing works. This creates the possibility of using such devices for high-resolution applications such as gas sensing and hyperspectral imaging.

Original languageEnglish
Pages (from-to)2743-2746
Number of pages4
JournalOptics Letters
Issue number12
Publication statusPublished - Jun 2015
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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