Tuned diamond turning of micro-structured surfaces on brittle materials for the improvement of machining efficiency

Zhiwei Zhu, Zhen Tong, Suet To, Xiangqian Jiang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

14 Citations (Scopus)


Target at improving the machining efficiency for diamond turning of micro-structured surfaces on brittle materials, a general technique named tuned diamond turning is proposed through strictly matching the maximum depth-of-cut with the critical one during turning, and the correspondingtoolpath planning algorithm is developed. Practically, a novel piezo-actuated dual-axial fast tool servo system is introduced to realize the tuning concept, and a typical micro-structured surface free from cracks is successfully generated on a single crystal silicon wafer. Compared with fast-/slow tool servo, the machining efficiency is improved by a factor of 16.35%, demonstrating the effectiveness of the tuned diamond turning.

Original languageEnglish
Pages (from-to)559-562
Number of pages4
JournalCIRP Annals
Issue number1
Publication statusPublished - 1 Jan 2019


  • Brittleness
  • Cutting

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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