Tunable MEMS LC resonator with large tuning range

A. B. Yu, A. Q. Liu, Q. X. Zhang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

7 Citations (Scopus)

Abstract

A tunable resonator based on MEMS technology is reported. The resonator is a parallel LC type resonator, in which the capacitor is made up of two metal bridges and the inductor is made up of a shorted stub. The length of the shorted stub is changed by shunt DC contact switches and therefore inductance values of the resonator can be varied. As a result, the resonant frequency of the resonator can be shifted from 8 to 14 GHz with. 75% tunable range. The whole size of the resonator is 6 × 0.9 mm 2.

Original languageEnglish
Pages (from-to)855-857
Number of pages3
JournalElectronics Letters
Volume41
Issue number15
DOIs
Publication statusPublished - 21 Jul 2005
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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