Keyphrases
Grating
100%
Micromachining
100%
Tunable Laser
100%
Continuous Wavelength Tuning
100%
Tuning Range
50%
Semiconductors
50%
Single chip
50%
Side-mode Suppression Ratio
50%
Maximum Power
50%
Microlens
50%
Micro-electro-mechanical Systems
50%
Continuous Tuning
50%
Micro-electro-mechanical Systems Technology
50%
Fast Tuning
50%
Tuning Speed
50%
Littrow
50%
Compact Size
50%
Batch Fabrication
50%
Wavelength Stability
50%
Pivot Position
50%
Integrated chip
50%
Littrow Configuration
50%
Continuous Tuning Range
50%
Blazed Grating
50%
Integrated Laser
50%
Silicon chip
50%
Engineering
Microelectromechanical System
100%
System Technology
50%
Single Chip
50%
Compact Size
50%
Littrow Configuration
50%
Blazed Grating
50%
Physics
Tunable Laser
100%
Microelectromechanical System
100%