Tunable laser using micromachined grating with continuous wavelength tuning

A. Q. Liu, Xuming Zhang, D. Y. Tang, Chao Lu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

41 Citations (Scopus)


This letter develops a method that is able to optimize the grating pivot position to obtain maximum continuous tuning range for a Littrow laser, and also verifies the method by implementation of a single-chip integrated laser using the microelectromechanical systems (MEMS) technology. The laser consists of a semiconductor gain chip, a microlens, and a MEMS blazed grating arranged in the Littrow configuration. The laser is integrated onto a single silicon chip while maintaining the ability of continuous tuning in a large range. It has a compact size of 2.0 mm × 1.5 mm × 0.6 mm, and has obtained a tuning range of 30.3 nm with a resolution of 0.03 nm/V2, a maximum power of 0.4 dBm and a side mode suppression ratio of 26 dB. Other merits include fast tuning speed, improved mechanical/wavelength stability, batch fabrication, and low cost.
Original languageEnglish
Pages (from-to)3684-3686
Number of pages3
JournalApplied Physics Letters
Issue number17
Publication statusPublished - 25 Oct 2004
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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