Tunable external-cavity laser using MEMS technology

X. M. Zhang, A. Q. Liu, D. Y. Tang, Chao Lu, J. Z. Hao, A. Asundi

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

1 Citation (Scopus)

Abstract

This paper reports a tunable external-cavity diode laser using a MEMS curved mirror fabricated on a silicon-on-insulator (SOI) wafer. In addition to the many advantages coming with the MEMS technology, this laser has the benefits of low alignment requirement, easy integration/packaging and potentially large wavelength tuning range. It has a size of 1.5 mmx1 mm (not including the optical fiber), and obtains a wavelength tuning range of 10.6 nm. The output power is about 5 mW at 40 mA injection current (Ith= 26 mA).
Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherIEEE
Pages1502-1505
Number of pages4
Volume2
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 1 Jan 2003
Externally publishedYes
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 8 Jun 200312 Jun 2003

Conference

Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period8/06/0312/06/03

Keywords

  • Diode lasers
  • Fiber lasers
  • Laser tuning
  • Micromechanical devices
  • Mirrors
  • Optical fibers
  • Optical tuning
  • Packaging
  • Silicon on insulator technology
  • Tunable circuits and devices

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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