Tunability of Pd-nanogapped H2sensors made on SiO2-coated Si micropillar arrays

Meng Zhao, Man Hon Wong, Chung Wo Ong, Ngai Hang Ng, Hau Chung Man

Research output: Journal article publicationJournal articleAcademic researchpeer-review

6 Citations (Scopus)

Abstract

A micro-nano hybrid technique is implemented to produce Pd-nanogapped gas sensors with tunable H2sensing properties. The basic idea is to deposit a Pd film on a SiO2-coated Si micropillar array. By adjusting the SiO2-gap size and Pd film thickness, one can tune the size and distribution of the nanogaps in the Pd film precisely to achieve the desired gas sensing performances. With this approach, sensors of three different configurations were fabricated to go through the tests for 0–6% H2at 40 °C. Different sensor types were found to give respective dynamic range of detection, shape of sensor response and mode of operation. The sensor type designed to contain an Au/Cr buffer layer exhibits a detection limit of 20 ppm of H2. The method is scalable and compatible with Si-based micromachining processes. The design is also extendable for making multi-sensor arrays. The physical mechanisms involved in controlling the sensor properties are proposed and discussed.
Original languageEnglish
Pages (from-to)944-951
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume255
DOIs
Publication statusPublished - 1 Feb 2018

Keywords

  • Hydrogen sensor
  • Micro-nano hybrid technique
  • Pd nanogap
  • Si micropillar
  • Tunable performance

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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