Tribological characteristics of Ti-Si-N films deposited by unbalanced DC magnetron sputtering

Keyphrases

• TiAlN Film 100%
• DC Magnetron Sputtering 100%
• Tribological Characteristics 100%
• TiSiN Coating 100%
• Surface Morphology 42%
• Friction Behavior 42%
• Wear Resistance 28%
• Adhesion Properties 28%
• Wear Rate 28%
• Pin-on-disc Test 28%
• Break-in 28%
• Microstructure 14%
• Surface Roughness 14%
• Surface Texture 14%
• X Ray Diffraction 14%
• Atomic Force Microscopy 14%
• Steady State 14%
• Crystallographic Texture 14%
• Energy Dispersive X-ray Analysis 14%
• Silicon Content 14%
• Friction Reduction 14%
• Elastic Recovery 14%
• Silicon Nitride 14%
• Wear Mechanism 14%
• Scanning Electron Microscope 14%
• Tribological Properties 14%
• Adhesion Strength 14%
• Wear Performance 14%
• Microstructure Mechanism 14%
• TiN Coating 14%
• Scratch Test 14%
• Elemental Composition 14%
• Dry Sliding Wear 14%
• Main Failure Modes 14%
• Effective Shear Stress 14%
• Adhesion Performance 14%
• Tribological Performance 14%
• Coating Microstructure 14%
• High Temperature Wear Resistance 14%
• Contact Mode 14%
• Friction Wear 14%
• Tungsten Carbide WC 14%
• Strength Quality 14%
• TiSiN 14%
• High-speed Steel Substrate 14%
• Tribological Tests 14%
• Dynamic Roughness 14%
• AISI M2 Steel 14%
• Near-surface Region 14%
• Optical Electron Microscope 14%
• Wear Scar Diameter 14%
• Hardness Microstructure 14%
• Rockwell-C Adhesion Test 14%

Material Science

• Wear Resistance 100%
• Surface Morphology 100%
• Magnetron Sputtering 100%
• Film 100%
• Silicon 100%
• Surface Roughness 33%
• Energy Dispersive X Ray Analysis 33%
• High Speed Steel 33%
• Scanning Electron Microscopy 33%
• Surface Texture 33%
• Carbide 33%
• Tungsten 33%
• Tribological Performance 33%
• Surface (Surface Science) 33%
• X-Ray Diffraction 33%
• Crystallography 33%
• Atomic Force Microscopy 33%
• Bond Strength (Materials) 33%
• Thin Films 33%
• Phase Composition 33%

Engineering

• Deposited Film 100%
• Magnetron 100%
• Wear Resistance 100%
• Surface Morphology 66%
• Critical Load 66%
• Elemental Composition 33%
• Silicon Content 33%
• Elastic Recovery 33%
• Ray Diffraction 33%
• Pin-on-Disc 33%
• Energy-Dispersive X-Ray Analysis 33%
• Pin-on-Disk Wear Test 33%
• Tribological Performance 33%
• Contact Mode 33%
• Surface Region 33%
• High-Speed Steel 33%
• Atomic Force Microscopy 33%
• Thin Films 33%
• Failure Mode 33%
• Rockwell C 33%
• Scanning Electron Microscope 33%