Triaxial Fast Tool Servo Using Hybrid Electromagnetic-Piezoelectric Actuation for Diamond Turning

Zi Hui Zhu, Li Chen, Yuhan Niu, Xiaonan Pu, Peng Huang, Suet To, Limin Zhu, Zhiwei Zhu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

20 Citations (Scopus)


A high-performance tri-axial fast tool servo (FTS) with the hybrid electromagnetic-piezoelectric actuation and the hybrid parallel-serial-kinematic structure is reported. Featuring the balanced and uniform actuation, a novel axis-symmetric linearized reluctance actuator is proposed to generate the planar motion in parallel, and the piezo-actuated vertical motion is then serially carried by the planar motion within a limited space. Verified by the finite element analysis, a two-stage design strategy is developed to optimally determine the multi-physical system parameters for the tri-axial FTS, assisted by an analytical model of the electromagnetic circuit as well as the mechanical mechanism. As for the trajectory tracking, the loop-shaping tuned PID controller with a feedforward compensator is employed for each axis, and a damping controller is additionally designed for the planar motion. Finally, both open-loop and closed-loop performance of the prototype are carefully demonstrated.

Original languageEnglish
Article number1728-1738
JournalIEEE Transactions on Industrial Electronics
Issue number2
Publication statusPublished - Feb 2022


  • Bandwidth
  • Electromagnetics
  • Fast tool servo
  • Force
  • hybrid parallel-serial-kinematic
  • linearized reluctance actu-ator
  • Magnetic circuits
  • multi-physical parameter optimization
  • piezoelectric actuator
  • Servomotors
  • Tools
  • Turning

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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