Transparent conductive and infrared reflective AZO/Cu/AZO multilayer film prepared by RF magnetron sputtering

Dagang Miao, Shou-xiang Kinor Jiang, Songmin Shang, Hongmei Zhao, Zhuoming Chen

Research output: Journal article publicationJournal articleAcademic researchpeer-review

15 Citations (Scopus)


AZO/Cu/AZO multilayer films were prepared on glass substrate by radio frequency magnetron sputtering technology. The prepared films were investigated by a four-point probe system, X-ray diffraction, optical transmittance spectra, scanning electron microscope, atomic force microscopy and Fourier transform infrared spectroscopy. The results showed that Cu inner layer started forming a continuous film at the thickness around 11 nm. The prepared AZO/Cu/AZO samples exhibited the visible transmittance of 60–80 % and sample with 15 nm Cu inner layer showed the highest infrared reflection rate of 67 % in FIR region and the lowest sheet resistance of 16.6 Ω/sq. The proper visible transmittance and infrared reflection property of the AZO/Cu/AZO multilayer film make it a promising candidate for future energy conservation materials.
Original languageEnglish
Pages (from-to)5248-5254
Number of pages7
JournalJournal of Materials Science: Materials in Electronics
Issue number12
Publication statusPublished - 6 Nov 2014

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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