Transfer imprint lithography using a soft mold

J.Z. Xin, F.K. Lee, S.Y.W. Li, K.S. Chan, H.L.W. Chan, Chi Wah Leung

Research output: Unpublished conference presentation (presented paper, abstract, poster)Conference presentation (not published in journal/proceeding/book)Academic researchpeer-review

Original languageEnglish
Pages1-2
Number of pages2
Publication statusPublished - 2010

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