@article{1645f40a0a8f40549ab883c955b93454,
title = "Tracking Control of PZT-Driven Compliant Precision Positioning Micromanipulator",
abstract = "This paper focuses on improving tracking performance of totally uncoupled compliant micromanipulator based on robust control method of elliptical hysteresis model. The hysteresis model and hysteresis compensation model for proposed mechanism based on Piezoelectric transducer (PZT) are established by using elliptical model method. The values of elliptical hysteresis model parameters are identified by simulating method with different frequencies of control input. The uncertainty model is also established, the values of corresponding estimated parameters are conformed by experiment method. Based on the uncertainty model and elliptical hysteresis model, the robust tracking control method is presented and utilized to evaluate the tracking performance of proposed mechanism under inputting different tracking curves. The proposed method can accurately control the output displacement and improve tracking performance of this mechanism, which are validated and carried out by using experimental studies. Additionally, the coupling errors between two directions are kept within 0.14% and the tracking errors for different curves are within 2.5%. ",
keywords = "Elliptic model, micro/nano manipulator, positioning tracking, robust control",
author = "Zhigang Wu and Min Chen and Ping He and Heng Li and Qi Zhang and Xingzhong Xiong and Mi, {Hao Yang} and Zuxin Li and Yangmin Li",
note = "Funding Information: This work was supported in part by the National Natural Science Foundation of China under Grant 11705122, Grant 61902268, and Grant 51575544, in part by the Sichuan Science and Technology Program under Grant 2020YFH0124, Grant 2020YJ0368, Grant 2019YFSY0045, Grant 2018GZDZX0046, and Grant 2018JY0197, in part by the Education Department of Jiangxi Province under Grant GJJ170568, in part by the Outstanding Youth Backbone Project of Jinan University under Grant 2019QNGG26, in part by the Hong Kong Research Grants Council under Grant BRE/PolyU 152099/18E and Grant PolyU 15204719/18E, in part by the Natural Science Foundation of The Hong Kong Polytechnic University under Grant G-YW3X, in part by the Guangxi Natural Science Foundation of China under Grant 2018GXNSFAA138092, in part by the Project on Promoting Scientific Research Ability of Young and Middle-aged People in Guangxi under Grant 2018KY1095, in part by the Specialized Talents in Guangxi under Grant AD18281018, in part by the Special Foundation of High-tech Zone of Zigong city under Grant 2021, in part by the Open Foundation of Artificial Intelligence Key Laboratory of Sichuan Province under Grant 2018RZJ01, in part by the Nature Science Foundation of Sichuan University of Science and Engineering under Grant 2017RCL52, in part by the Zigong Science and Technology Program of China under Grant 2019YYJC03 and Grant 2019YYJC15, and in part by the General Research Fund (GRF) under Grant BRE/PolyU 152047/19E and Grant BRE/PolyU15210720. Publisher Copyright: {\textcopyright} 2013 IEEE.",
year = "2020",
month = jul,
day = "8",
doi = "10.1109/ACCESS.2020.3006964",
language = "English",
volume = "8",
pages = "126477--126487",
journal = "IEEE Access",
issn = "2169-3536",
publisher = "IEEE",
}