Towards thin film complete characterization using ultrasonics

P. A. Mante, A. Devos, J. F. Robillard

Research output: Journal article publicationConference articleAcademic researchpeer-review

3 Citations (Scopus)

Abstract

Picosecond ultrasonics is an ultrafast time-resolved technique which offers an unique way of measuring elastic properties in thin films and multi-layers. In the conventional setup only longitudinal waves can be excited by the laser. But in order to have a complete characterization, we need in-plane informations. Here, we show that using a nanostructured aluminum film as a transducer, we can excite longitudinal and high-frequency surface waves using a standard setup. By measuring longitudinal and surface velocities, we can deduce the Young Modulus and the Poisson Ratio which complete the characterization of any isotropic materials. Here we applied this technique to AlN, SiO2 and Si 3N4.

Original languageEnglish
Article number4803456
Pages (from-to)1203-1206
Number of pages4
JournalProceedings - IEEE Ultrasonics Symposium
DOIs
Publication statusPublished - 1 Dec 2008
Externally publishedYes
Event2008 IEEE International Ultrasonics Symposium, IUS 2008 - Beijing, China
Duration: 2 Nov 20085 Nov 2008

Keywords

  • Poisson ratio
  • Silicon compounds
  • Surface acoustic waves
  • Thin films
  • Ultrasonics
  • Young's modulus

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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