Towards thin film complete characterization using ultrasonics

P. A. Mante; A. Devos; J. F. Robillard

doi:10.1109/ULTSYM.2008.0290

Towards thin film complete characterization using ultrasonics

P. A. Mante, A. Devos, J. F. Robillard

Research output: Journal article publication › Conference article › Academic research › peer-review

3 Citations (Scopus)

Abstract

Picosecond ultrasonics is an ultrafast time-resolved technique which offers an unique way of measuring elastic properties in thin films and multi-layers. In the conventional setup only longitudinal waves can be excited by the laser. But in order to have a complete characterization, we need in-plane informations. Here, we show that using a nanostructured aluminum film as a transducer, we can excite longitudinal and high-frequency surface waves using a standard setup. By measuring longitudinal and surface velocities, we can deduce the Young Modulus and the Poisson Ratio which complete the characterization of any isotropic materials. Here we applied this technique to AlN, SiO₂ and Si ₃N₄.

Original language	English
Article number	4803456
Pages (from-to)	1203-1206
Number of pages	4
Journal	Proceedings - IEEE Ultrasonics Symposium
DOIs	https://doi.org/10.1109/ULTSYM.2008.0290
Publication status	Published - 1 Dec 2008
Externally published	Yes
Event	2008 IEEE International Ultrasonics Symposium, IUS 2008 - Beijing, China Duration: 2 Nov 2008 → 5 Nov 2008

Keywords

Poisson ratio
Silicon compounds
Surface acoustic waves
Thin films
Ultrasonics
Young's modulus

ASJC Scopus subject areas

Acoustics and Ultrasonics

More information

10.1109/ULTSYM.2008.0290

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@article{883854b09257478a85f2f76a290302f5,

title = "Towards thin film complete characterization using ultrasonics",

abstract = "Picosecond ultrasonics is an ultrafast time-resolved technique which offers an unique way of measuring elastic properties in thin films and multi-layers. In the conventional setup only longitudinal waves can be excited by the laser. But in order to have a complete characterization, we need in-plane informations. Here, we show that using a nanostructured aluminum film as a transducer, we can excite longitudinal and high-frequency surface waves using a standard setup. By measuring longitudinal and surface velocities, we can deduce the Young Modulus and the Poisson Ratio which complete the characterization of any isotropic materials. Here we applied this technique to AlN, SiO2 and Si 3N4.",

keywords = "Poisson ratio, Silicon compounds, Surface acoustic waves, Thin films, Ultrasonics, Young's modulus",

author = "Mante, {P. A.} and A. Devos and Robillard, {J. F.}",

year = "2008",

month = dec,

day = "1",

doi = "10.1109/ULTSYM.2008.0290",

language = "English",

pages = "1203--1206",

journal = "Proceedings - IEEE Ultrasonics Symposium",

issn = "1051-0117",

publisher = "IEEE",

note = "2008 IEEE International Ultrasonics Symposium, IUS 2008 ; Conference date: 02-11-2008 Through 05-11-2008",

}

TY - JOUR

T1 - Towards thin film complete characterization using ultrasonics

AU - Mante, P. A.

AU - Devos, A.

AU - Robillard, J. F.

PY - 2008/12/1

Y1 - 2008/12/1

N2 - Picosecond ultrasonics is an ultrafast time-resolved technique which offers an unique way of measuring elastic properties in thin films and multi-layers. In the conventional setup only longitudinal waves can be excited by the laser. But in order to have a complete characterization, we need in-plane informations. Here, we show that using a nanostructured aluminum film as a transducer, we can excite longitudinal and high-frequency surface waves using a standard setup. By measuring longitudinal and surface velocities, we can deduce the Young Modulus and the Poisson Ratio which complete the characterization of any isotropic materials. Here we applied this technique to AlN, SiO2 and Si 3N4.

AB - Picosecond ultrasonics is an ultrafast time-resolved technique which offers an unique way of measuring elastic properties in thin films and multi-layers. In the conventional setup only longitudinal waves can be excited by the laser. But in order to have a complete characterization, we need in-plane informations. Here, we show that using a nanostructured aluminum film as a transducer, we can excite longitudinal and high-frequency surface waves using a standard setup. By measuring longitudinal and surface velocities, we can deduce the Young Modulus and the Poisson Ratio which complete the characterization of any isotropic materials. Here we applied this technique to AlN, SiO2 and Si 3N4.

KW - Poisson ratio

KW - Silicon compounds

KW - Surface acoustic waves

KW - Thin films

KW - Ultrasonics

KW - Young's modulus

UR - http://www.scopus.com/inward/record.url?scp=67649382711&partnerID=8YFLogxK

U2 - 10.1109/ULTSYM.2008.0290

DO - 10.1109/ULTSYM.2008.0290

M3 - Conference article

AN - SCOPUS:67649382711

SN - 1051-0117

SP - 1203

EP - 1206

JO - Proceedings - IEEE Ultrasonics Symposium

JF - Proceedings - IEEE Ultrasonics Symposium

M1 - 4803456

T2 - 2008 IEEE International Ultrasonics Symposium, IUS 2008

Y2 - 2 November 2008 through 5 November 2008

ER -

Towards thin film complete characterization using ultrasonics

Abstract

Keywords

ASJC Scopus subject areas

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