TY - JOUR
T1 - Toward self-powered inertial sensors enabled by triboelectric effect
AU - Miao, Qianqian
AU - Liu, Chaoran
AU - Zhang, Nan
AU - Lu, Keyu
AU - Gu, Haojie
AU - Jiao, Jiwei
AU - Zhang, Jian
AU - Wang, Zuankai
AU - Zhou, Xiaofeng
N1 - Funding Information:
We acknowledge financial support from National Natural Science Foundation of China (No. 51975215, No. 31771083, and No. 61804038), Natural Science Foundation of Shanghai (20ZR1418600), the Science and Technology Commission of Shanghai Municipality (No. 19511120100), the initial funding for scientific research of ECNU, and the Strategic Priority Research Program of ECNU.
Publisher Copyright:
© 2020 American Chemical Society
PY - 2020/10/27
Y1 - 2020/10/27
N2 - With the arrival of the internet of things (IoTs) era, inertial sensors are considered to be essential components for inertial navigation, earthquake monitoring, troubleshooting of mechanical equipment, and more. To fulfill the requirements of self-powered inertial sensing, inertial sensors enabled by triboelectric effect have been proposed as an effective solution. In this review, an overview of development of triboelectric effect based inertial sensors is systematically presented. To thoroughly understand and rationally design triboelectric effect based inertial sensors, we first discuss the theoretical study and the structural design of triboelectric effect based inertial sensors. The fabrication of these inertial sensors is further discussed. Subsequently, critical output parameters of recent triboelectric effect based inertial sensors including sensitivity, linearity, detection range, mechanical shock survivability, and detection direction are summarized. And then, various applications of these sensors are summarized. Finally, based on recent progress, the superiority, existing challenges, and prospects for triboelectric effect based inertial sensors are outlined and discussed. This review will lead to a deeper understanding and exploration of triboelectric effect based inertial sensors for researchers and engineers.
AB - With the arrival of the internet of things (IoTs) era, inertial sensors are considered to be essential components for inertial navigation, earthquake monitoring, troubleshooting of mechanical equipment, and more. To fulfill the requirements of self-powered inertial sensing, inertial sensors enabled by triboelectric effect have been proposed as an effective solution. In this review, an overview of development of triboelectric effect based inertial sensors is systematically presented. To thoroughly understand and rationally design triboelectric effect based inertial sensors, we first discuss the theoretical study and the structural design of triboelectric effect based inertial sensors. The fabrication of these inertial sensors is further discussed. Subsequently, critical output parameters of recent triboelectric effect based inertial sensors including sensitivity, linearity, detection range, mechanical shock survivability, and detection direction are summarized. And then, various applications of these sensors are summarized. Finally, based on recent progress, the superiority, existing challenges, and prospects for triboelectric effect based inertial sensors are outlined and discussed. This review will lead to a deeper understanding and exploration of triboelectric effect based inertial sensors for researchers and engineers.
KW - Accelerometer
KW - Contact electrification
KW - Gyroscope
KW - Inertial sensors
KW - Motion sensors
KW - Self-powered
KW - Triboelectric effect
KW - Triboelectric nanogenerators
UR - http://www.scopus.com/inward/record.url?scp=85094626149&partnerID=8YFLogxK
U2 - 10.1021/acsaelm.0c00644
DO - 10.1021/acsaelm.0c00644
M3 - Review article
AN - SCOPUS:85094626149
SN - 2637-6113
VL - 2
SP - 3072
EP - 3087
JO - ACS Applied Electronic Materials
JF - ACS Applied Electronic Materials
IS - 10
ER -