Keyphrases
Actuator
100%
Quasi-static
100%
Electrostatic Actuator
100%
Static Algorithm
100%
Finite Element Analysis
33%
Design Tools
33%
Micro-electro-mechanical Systems
33%
Parameter Optimization
33%
Single-side
33%
Zipper
33%
Moving Element
33%
Curved Electrode
33%
Highly Nonlinear
16%
Prestress
16%
Complex Structure
16%
Simulation Method
16%
Scripting Languages
16%
Numerical Algorithms
16%
Differential Equations
16%
Static Behavior
16%
Two Dimensional Model
16%
Finite Element Simulation
16%
Complex Geometry
16%
Model Geometry
16%
Algorithm Analysis
16%
System Switching
16%
Stopper
16%
Simplified Analytical Method
16%
Mathematical Description
16%
Moving Parts
16%
Final Design
16%
Material Inhomogeneity
16%
Multi-contact
16%
Complex Measurement
16%
Main Application
16%
Matrix Laboratory (MATLAB)
16%
Prestressed Materials
16%
Touch Mode
16%
Electrostatic Nonlinearity
16%
Quasi-static Modeling
16%
Fast Determination
16%
Thickness Homogeneity
16%
Engineering
Actuator
100%
Finite Element Analysis
33%
Microelectromechanical System
22%
Thin Films
22%
Design Tool
22%
Two Dimensional
11%
Main Application
11%
Simulation Method
11%
One Dimensional
11%
Complex Structure
11%
Parameter Set
11%
Mathematical Description
11%
Model Geometry
11%
Moving Part
11%
Great Detail
11%
Iteration Step
11%
Final Design
11%
Limitations
11%
Analytical Model
11%
Dimensional Model
11%