Time and temperature-dependent changes in the structural properties of tetrahedral amorphous carbon films

B. K. Tay, D. Sheeja, Shu Ping Lau, X. Shi, B. C. Seet, Y. C. Yeo

Research output: Journal article publicationJournal articleAcademic researchpeer-review

22 Citations (Scopus)

Abstract

The time and temperature-dependent changes in the structural properties of tetrahedral amorphous carbon (ta-C) films were accessed continuously by Raman spectroscopy. It has been found that a film of 70-nm thickness remains structurally stable after annealing in air at up to 300°C for 4 h. Although some degree of graphitization was observed on a film annealed at 400°C, the film begins to oxidize and lose thickness only after annealing at 500°C for more than 2 h. This reflects the high thermal stability of the films. In general, annealing results in a narrowing and an upshifting of the G-band together with an increase in the ID/IGratio. Most of these changes were observed during the first 2 h of annealing, after which the structure of the film appears to stabilize, with the exception at 500°C in which the film deteriorates further as oxidation occurs. It was also observed that thin film has better thermal stability against graphitization than thick film.
Original languageEnglish
Pages (from-to)248-251
Number of pages4
JournalSurface and Coatings Technology
Volume130
Issue number2-3
DOIs
Publication statusPublished - 1 Jan 2000
Externally publishedYes

Keywords

  • Amorphous carbon film
  • Annealing
  • Graphitization
  • Raman spectra
  • Thermal stability

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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