Three-dimensional polarization splitter and rotator based on multi-layer Si3N4-on-SOI platform

Kang Tan, Ying Huang, Guo Qiang Lo, Chengkuo Lee, Changyuan Yu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

We propose a three-dimensional polarization splitter and rotator with high fabrication tolerance and CMOS BEOL compatibility, achieving a high TE-TE transmission and TM-TE conversion efficiency of -0.21dB and -0.63dB at 1310nm, respectively.
Original languageEnglish
Title of host publication2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
PublisherIEEE Computer Society
Volume2016-September
ISBN (Electronic)9781509010356
DOIs
Publication statusPublished - 13 Sep 2016
Event21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
Duration: 31 Jul 20164 Aug 2016

Conference

Conference21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
Country/TerritorySingapore
CitySingapore
Period31/07/164/08/16

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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