Three-dimensional polarization splitter and rotator based on multi-layer Si3N4-on-SOI platform

Kang Tan; Ying Huang; Guo Qiang Lo; Chengkuo Lee; Changyuan Yu

doi:10.1109/OMN.2016.7565934

Three-dimensional polarization splitter and rotator based on multi-layer Si₃N₄-on-SOI platform

Kang Tan, Ying Huang, Guo Qiang Lo, Chengkuo Lee, Changyuan Yu

The Hong Kong Polytechnic University

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

1 Citation (Scopus)

Abstract

We propose a three-dimensional polarization splitter and rotator with high fabrication tolerance and CMOS BEOL compatibility, achieving a high TE-TE transmission and TM-TE conversion efficiency of -0.21dB and -0.63dB at 1310nm, respectively.

Original language	English
Title of host publication	2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
Publisher	IEEE Computer Society
Volume	2016-September
ISBN (Electronic)	9781509010356
DOIs	https://doi.org/10.1109/OMN.2016.7565934
Publication status	Published - 13 Sept 2016
Event	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore Duration: 31 Jul 2016 → 4 Aug 2016

Conference

Conference	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
Country/Territory	Singapore
City	Singapore
Period	31/07/16 → 4/08/16

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

More information

10.1109/OMN.2016.7565934

Cite this

@inproceedings{b3fa6d41a887435e947ba32f885a16fb,

title = "Three-dimensional polarization splitter and rotator based on multi-layer Si3N4-on-SOI platform",

abstract = "We propose a three-dimensional polarization splitter and rotator with high fabrication tolerance and CMOS BEOL compatibility, achieving a high TE-TE transmission and TM-TE conversion efficiency of -0.21dB and -0.63dB at 1310nm, respectively.",

author = "Kang Tan and Ying Huang and Lo, {Guo Qiang} and Chengkuo Lee and Changyuan Yu",

year = "2016",

month = sep,

day = "13",

doi = "10.1109/OMN.2016.7565934",

language = "English",

volume = "2016-September",

booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",

publisher = "IEEE Computer Society",

address = "United States",

note = "21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",

}

Tan, K, Huang, Y, Lo, GQ, Lee, C & Yu, C 2016, Three-dimensional polarization splitter and rotator based on multi-layer Si₃N₄-on-SOI platform. in 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. vol. 2016-September, 7565934, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, Singapore, 31/07/16. https://doi.org/10.1109/OMN.2016.7565934

Three-dimensional polarization splitter and rotator based on multi-layer Si₃N₄-on-SOI platform. / Tan, Kang; Huang, Ying; Lo, Guo Qiang et al.
2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. Vol. 2016-September IEEE Computer Society, 2016. 7565934.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Three-dimensional polarization splitter and rotator based on multi-layer Si3N4-on-SOI platform

AU - Tan, Kang

AU - Huang, Ying

AU - Lo, Guo Qiang

AU - Lee, Chengkuo

AU - Yu, Changyuan

PY - 2016/9/13

Y1 - 2016/9/13

N2 - We propose a three-dimensional polarization splitter and rotator with high fabrication tolerance and CMOS BEOL compatibility, achieving a high TE-TE transmission and TM-TE conversion efficiency of -0.21dB and -0.63dB at 1310nm, respectively.

AB - We propose a three-dimensional polarization splitter and rotator with high fabrication tolerance and CMOS BEOL compatibility, achieving a high TE-TE transmission and TM-TE conversion efficiency of -0.21dB and -0.63dB at 1310nm, respectively.

UR - http://www.scopus.com/inward/record.url?scp=84990236274&partnerID=8YFLogxK

U2 - 10.1109/OMN.2016.7565934

DO - 10.1109/OMN.2016.7565934

M3 - Conference article published in proceeding or book

VL - 2016-September

BT - 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings

PB - IEEE Computer Society

T2 - 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016

Y2 - 31 July 2016 through 4 August 2016

ER -