Thickness-dependent structural characteristics of sol-gel-derived epitaxial (PbZr)TiO3films using inorganic zirconium salt

A. D. Li; Chee Leung Mak; K. H. Wong; Q. Y. Shao; Y. J. Wang; D. Wu; Naiben Ming

doi:10.1016/S0022-0248(01)01805-X

Thickness-dependent structural characteristics of sol-gel-derived epitaxial (PbZr)TiO₃films using inorganic zirconium salt

A. D. Li, Chee Leung Mak, K. H. Wong, Q. Y. Shao, Y. J. Wang, D. Wu, Naiben Ming

Research output: Journal article publication › Journal article › Academic research › peer-review

8 Citations (Scopus)

Abstract

Sol-gel-derived epitaxial ferroelectric Pb(Zr0.52Ti0.48)O3(PZT) thin films with varied thicknesses of 40nm-2.4μm were successfully fabricated on LaAlO3substrates using inorganic zirconium salt as precursor. Perovskite phase formation was achieved by rapid thermal annealing at 680°C. Thickness dependence of the structural and morphological properties of these epitaxial PZT films were investigated by means of X-ray diffractometry, scanning electron microscopy and atomic force microscopy. Thicker films showed progressively better epitaxy, improved density and smaller surface roughness. Our results suggested that this inorganic based sol-gel method is suitable for growth of epitaxial PZT thick films of up to several micrometers.

Original language	English
Pages (from-to)	307-312
Number of pages	6
Journal	Journal of Crystal Growth
Volume	235
Issue number	1-4
DOIs	https://doi.org/10.1016/S0022-0248(01)01805-X
Publication status	Published - 1 Feb 2002

Keywords

A1. Thickness
A1. X-ray diffraction
A3. Epitaxy
A3. Sol-gel method
B1. Perovskites
B1. Titanium compounds

ASJC Scopus subject areas

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

More information

10.1016/S0022-0248(01)01805-X

Cite this

@article{0eba3b4a005b45d38281b82ce7e3560f,

title = "Thickness-dependent structural characteristics of sol-gel-derived epitaxial (PbZr)TiO3films using inorganic zirconium salt",

abstract = "Sol-gel-derived epitaxial ferroelectric Pb(Zr0.52Ti0.48)O3(PZT) thin films with varied thicknesses of 40nm-2.4μm were successfully fabricated on LaAlO3substrates using inorganic zirconium salt as precursor. Perovskite phase formation was achieved by rapid thermal annealing at 680°C. Thickness dependence of the structural and morphological properties of these epitaxial PZT films were investigated by means of X-ray diffractometry, scanning electron microscopy and atomic force microscopy. Thicker films showed progressively better epitaxy, improved density and smaller surface roughness. Our results suggested that this inorganic based sol-gel method is suitable for growth of epitaxial PZT thick films of up to several micrometers.",

keywords = "A1. Thickness, A1. X-ray diffraction, A3. Epitaxy, A3. Sol-gel method, B1. Perovskites, B1. Titanium compounds",

author = "Li, {A. D.} and Mak, {Chee Leung} and Wong, {K. H.} and Shao, {Q. Y.} and Wang, {Y. J.} and D. Wu and Naiben Ming",

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doi = "10.1016/S0022-0248(01)01805-X",

language = "English",

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T1 - Thickness-dependent structural characteristics of sol-gel-derived epitaxial (PbZr)TiO3films using inorganic zirconium salt

AU - Li, A. D.

AU - Mak, Chee Leung

AU - Wong, K. H.

AU - Shao, Q. Y.

AU - Wang, Y. J.

AU - Wu, D.

AU - Ming, Naiben

PY - 2002/2/1

Y1 - 2002/2/1

N2 - Sol-gel-derived epitaxial ferroelectric Pb(Zr0.52Ti0.48)O3(PZT) thin films with varied thicknesses of 40nm-2.4μm were successfully fabricated on LaAlO3substrates using inorganic zirconium salt as precursor. Perovskite phase formation was achieved by rapid thermal annealing at 680°C. Thickness dependence of the structural and morphological properties of these epitaxial PZT films were investigated by means of X-ray diffractometry, scanning electron microscopy and atomic force microscopy. Thicker films showed progressively better epitaxy, improved density and smaller surface roughness. Our results suggested that this inorganic based sol-gel method is suitable for growth of epitaxial PZT thick films of up to several micrometers.

AB - Sol-gel-derived epitaxial ferroelectric Pb(Zr0.52Ti0.48)O3(PZT) thin films with varied thicknesses of 40nm-2.4μm were successfully fabricated on LaAlO3substrates using inorganic zirconium salt as precursor. Perovskite phase formation was achieved by rapid thermal annealing at 680°C. Thickness dependence of the structural and morphological properties of these epitaxial PZT films were investigated by means of X-ray diffractometry, scanning electron microscopy and atomic force microscopy. Thicker films showed progressively better epitaxy, improved density and smaller surface roughness. Our results suggested that this inorganic based sol-gel method is suitable for growth of epitaxial PZT thick films of up to several micrometers.

KW - A1. Thickness

KW - A1. X-ray diffraction

KW - A3. Epitaxy

KW - A3. Sol-gel method

KW - B1. Perovskites

KW - B1. Titanium compounds

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U2 - 10.1016/S0022-0248(01)01805-X

DO - 10.1016/S0022-0248(01)01805-X

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SN - 0022-0248

VL - 235

SP - 307

EP - 312

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-4

ER -