Thickness-dependent structural characteristics of sol-gel-derived epitaxial (PbZr)TiO3films using inorganic zirconium salt

A. D. Li, Chee Leung Mak, K. H. Wong, Q. Y. Shao, Y. J. Wang, D. Wu, Naiben Ming

Research output: Journal article publicationJournal articleAcademic researchpeer-review

8 Citations (Scopus)


Sol-gel-derived epitaxial ferroelectric Pb(Zr0.52Ti0.48)O3(PZT) thin films with varied thicknesses of 40nm-2.4μm were successfully fabricated on LaAlO3substrates using inorganic zirconium salt as precursor. Perovskite phase formation was achieved by rapid thermal annealing at 680°C. Thickness dependence of the structural and morphological properties of these epitaxial PZT films were investigated by means of X-ray diffractometry, scanning electron microscopy and atomic force microscopy. Thicker films showed progressively better epitaxy, improved density and smaller surface roughness. Our results suggested that this inorganic based sol-gel method is suitable for growth of epitaxial PZT thick films of up to several micrometers.
Original languageEnglish
Pages (from-to)307-312
Number of pages6
JournalJournal of Crystal Growth
Issue number1-4
Publication statusPublished - 1 Feb 2002


  • A1. Thickness
  • A1. X-ray diffraction
  • A3. Epitaxy
  • A3. Sol-gel method
  • B1. Perovskites
  • B1. Titanium compounds

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


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