Thermal wave probe microscopy for materials characterization

M. B. Suddendorf; Michael Geoffrey Somekh; M. Liu

doi:10.1080/00207219408926035

Thermal wave probe microscopy for materials characterization

M. B. Suddendorf, Michael Geoffrey Somekh, M. Liu

Research output: Journal article publication › Journal article › Academic research › peer-review

1 Citation (Scopus)

Abstract

A system capable of measuring photoreflectance and phoiodisplacement phenomena simultaneously is described. Results are presented showing the imaging performance of the system, and the applications to semiconductor and thin-film characterization are discussed.

Original language	English
Pages (from-to)	71-76
Number of pages	6
Journal	International Journal of Electronics
Volume	77
Issue number	1
DOIs	https://doi.org/10.1080/00207219408926035
Publication status	Published - 1 Jan 1994
Externally published	Yes

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1080/00207219408926035

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title = "Thermal wave probe microscopy for materials characterization",

abstract = "A system capable of measuring photoreflectance and phoiodisplacement phenomena simultaneously is described. Results are presented showing the imaging performance of the system, and the applications to semiconductor and thin-film characterization are discussed.",

author = "Suddendorf, \{M. B.\} and Somekh, \{Michael Geoffrey\} and M. Liu",

year = "1994",

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AU - Somekh, Michael Geoffrey

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N2 - A system capable of measuring photoreflectance and phoiodisplacement phenomena simultaneously is described. Results are presented showing the imaging performance of the system, and the applications to semiconductor and thin-film characterization are discussed.

AB - A system capable of measuring photoreflectance and phoiodisplacement phenomena simultaneously is described. Results are presented showing the imaging performance of the system, and the applications to semiconductor and thin-film characterization are discussed.

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DO - 10.1080/00207219408926035

M3 - Journal article

SN - 0020-7217

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JO - International Journal of Electronics

JF - International Journal of Electronics

IS - 1

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Thermal wave probe microscopy for materials characterization

Abstract

ASJC Scopus subject areas

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