Thermal management and alignment strategies in MEMS tunable laser packaging

Tao Ji Fang, Jonathan Tamil, Wu Jian, Xu Kun, Lin Jin Tong, Liu Ai Qun

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

A packaging architecture is developed for MEMS tunable laser (MEMS-TL). The hybrid integration of chips is realized under high accuracy thermal control and precise alignment. The thermal conductivity of the laser chip has been improved up to 60% by the proper substrate design of device and epi-down bonding method. Under the analysis of heat flux, we employ a thermoelectric cooler (TEC) to stabilize the temperature. The substrate is designed to accommodate gain chips with minimal active optical alignment, thus reducing the packaging cost. With this packaging scheme, the insertion loss is greatly induced less than 1 dB due to the advantages of horizontal and vertical alignment in optical fiber fastening and laser diode bonding.

Original languageEnglish
Title of host publicationNEMS/MEMS Technology and Devices - Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, ICMAT 2009
Pages319-322
Number of pages4
DOIs
Publication statusPublished - Jun 2009
Externally publishedYes
EventInternational Conference on Materials for Advanced Technologies, ICMAT 2009 - Singpore, Singapore
Duration: 28 Jun 20093 Jul 2009

Publication series

NameAdvanced Materials Research
Volume74
ISSN (Print)1022-6680

Conference

ConferenceInternational Conference on Materials for Advanced Technologies, ICMAT 2009
Country/TerritorySingapore
CitySingpore
Period28/06/093/07/09

Keywords

  • MEMS
  • Optical alignment
  • Packaging
  • Thermal management
  • Tunable laser

ASJC Scopus subject areas

  • General Engineering

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