Thermal analysis and design of a micro-hotplate for integrated gas sensor applications

Samuel K H Fung, Zhenan Tang, Philip Ching Ho Chan, Johnny K O Sin, Peter W. Cheung

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

5 Citations (Scopus)

Abstract

The application of commercial Mechanical Computer Aided Engineering (MCAE) software on the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides the estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during the layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result was compared with measurement. For the first time, Liquid Crystal Thermography is used to visualize the temperature profile on the hotplate.
Original languageEnglish
Title of host publicationInternational Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
PublisherIEEE
Pages818-821
Number of pages4
Publication statusPublished - 1 Dec 1995
Externally publishedYes
EventProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
Duration: 25 Jun 199529 Jun 1995

Conference

ConferenceProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
CountrySweden
CityStockholm
Period25/06/9529/06/95

ASJC Scopus subject areas

  • Engineering(all)

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