Thermal analysis and design of a micro-hotplate for integrated gas sensor applications

Samuel K H Fung; Zhenan Tang; Philip Ching Ho Chan; Johnny K O Sin; Peter W. Cheung

Thermal analysis and design of a micro-hotplate for integrated gas sensor applications

Samuel K H Fung, Zhenan Tang, Philip Ching Ho Chan, Johnny K O Sin, Peter W. Cheung

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

6 Citations (Scopus)

Abstract

The application of commercial Mechanical Computer Aided Engineering (MCAE) software on the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides the estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during the layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result was compared with measurement. For the first time, Liquid Crystal Thermography is used to visualize the temperature profile on the hotplate.

Original language	English
Title of host publication	International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
Publisher	IEEE
Pages	818-821
Number of pages	4
Publication status	Published - 1 Dec 1995
Externally published	Yes
Event	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995

Conference

Conference	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
Country/Territory	Sweden
City	Stockholm
Period	25/06/95 → 29/06/95

ASJC Scopus subject areas

General Engineering

Cite this

@inproceedings{8c89dcba992644c39cea1946d8787f8b,

title = "Thermal analysis and design of a micro-hotplate for integrated gas sensor applications",

abstract = "The application of commercial Mechanical Computer Aided Engineering (MCAE) software on the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides the estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during the layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result was compared with measurement. For the first time, Liquid Crystal Thermography is used to visualize the temperature profile on the hotplate.",

author = "Fung, {Samuel K H} and Zhenan Tang and Chan, {Philip Ching Ho} and Sin, {Johnny K O} and Cheung, {Peter W.}",

year = "1995",

month = dec,

day = "1",

language = "English",

pages = "818--821",

booktitle = "International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings",

publisher = "IEEE",

address = "United States",

note = "Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) ; Conference date: 25-06-1995 Through 29-06-1995",

}

Fung, SKH, Tang, Z, Chan, PCH, Sin, JKO & Cheung, PW 1995, Thermal analysis and design of a micro-hotplate for integrated gas sensor applications. in International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings. IEEE, pp. 818-821, Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden, 25/06/95.

Thermal analysis and design of a micro-hotplate for integrated gas sensor applications. / Fung, Samuel K H; Tang, Zhenan; Chan, Philip Ching Ho et al.
International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings. IEEE, 1995. p. 818-821.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Thermal analysis and design of a micro-hotplate for integrated gas sensor applications

AU - Fung, Samuel K H

AU - Tang, Zhenan

AU - Chan, Philip Ching Ho

AU - Sin, Johnny K O

AU - Cheung, Peter W.

PY - 1995/12/1

Y1 - 1995/12/1

N2 - The application of commercial Mechanical Computer Aided Engineering (MCAE) software on the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides the estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during the layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result was compared with measurement. For the first time, Liquid Crystal Thermography is used to visualize the temperature profile on the hotplate.

AB - The application of commercial Mechanical Computer Aided Engineering (MCAE) software on the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides the estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during the layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result was compared with measurement. For the first time, Liquid Crystal Thermography is used to visualize the temperature profile on the hotplate.

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M3 - Conference article published in proceeding or book

SP - 818

EP - 821

BT - International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

PB - IEEE

T2 - Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)

Y2 - 25 June 1995 through 29 June 1995

ER -

Thermal analysis and design of a micro-hotplate for integrated gas sensor applications

Abstract

Conference

ASJC Scopus subject areas

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