Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications

Samuel K.H. Fung, Zhenan Tang, Philip Ching Ho Chan, Johnny K.O. Sin, Peter W. Cheung

Research output: Journal article publicationJournal articleAcademic researchpeer-review

73 Citations (Scopus)

Abstract

The application of commercial mechanical computer-aided engineering (MCAE) software to the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides an estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result has been compared with experimental measurement. For the first time, liquid crystal thermography is used to visualize the temperature profile on the hotplate.
Original languageEnglish
Pages (from-to)482-487
Number of pages6
JournalSensors and Actuators, A: Physical
Volume54
Issue number1-3
DOIs
Publication statusPublished - 1 Jan 1996
Externally publishedYes

Keywords

  • Finite-element analysis
  • Micro-hotplates
  • Microfabrication techniques
  • Temperature control
  • Thin-film gas sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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