Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications

Samuel K.H. Fung; Zhenan Tang; Philip Ching Ho Chan; Johnny K.O. Sin; Peter W. Cheung

doi:10.1016/S0924-4247(97)80008-8

Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications

Samuel K.H. Fung, Zhenan Tang, Philip Ching Ho Chan, Johnny K.O. Sin, Peter W. Cheung

Research output: Journal article publication › Journal article › Academic research › peer-review

76 Citations (Scopus)

Abstract

The application of commercial mechanical computer-aided engineering (MCAE) software to the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides an estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result has been compared with experimental measurement. For the first time, liquid crystal thermography is used to visualize the temperature profile on the hotplate.

Original language	English
Pages (from-to)	482-487
Number of pages	6
Journal	Sensors and Actuators, A: Physical
Volume	54
Issue number	1-3
DOIs	https://doi.org/10.1016/S0924-4247(97)80008-8
Publication status	Published - 1 Jan 1996
Externally published	Yes

Keywords

Finite-element analysis
Micro-hotplates
Microfabrication techniques
Temperature control
Thin-film gas sensors

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/S0924-4247(97)80008-8

Cite this

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title = "Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications",

abstract = "The application of commercial mechanical computer-aided engineering (MCAE) software to the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides an estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result has been compared with experimental measurement. For the first time, liquid crystal thermography is used to visualize the temperature profile on the hotplate.",

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AU - Fung, Samuel K.H.

AU - Tang, Zhenan

AU - Chan, Philip Ching Ho

AU - Sin, Johnny K.O.

AU - Cheung, Peter W.

PY - 1996/1/1

Y1 - 1996/1/1

N2 - The application of commercial mechanical computer-aided engineering (MCAE) software to the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides an estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result has been compared with experimental measurement. For the first time, liquid crystal thermography is used to visualize the temperature profile on the hotplate.

AB - The application of commercial mechanical computer-aided engineering (MCAE) software to the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides an estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result has been compared with experimental measurement. For the first time, liquid crystal thermography is used to visualize the temperature profile on the hotplate.

KW - Finite-element analysis

KW - Micro-hotplates

KW - Microfabrication techniques

KW - Temperature control

KW - Thin-film gas sensors

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EP - 487

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

IS - 1-3

ER -

Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications

Abstract

Keywords

ASJC Scopus subject areas

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