Abstract
The application of commercial mechanical computer-aided engineering (MCAE) software to the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides an estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result has been compared with experimental measurement. For the first time, liquid crystal thermography is used to visualize the temperature profile on the hotplate.
Original language | English |
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Pages (from-to) | 482-487 |
Number of pages | 6 |
Journal | Sensors and Actuators, A: Physical |
Volume | 54 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 1 Jan 1996 |
Externally published | Yes |
Keywords
- Finite-element analysis
- Micro-hotplates
- Microfabrication techniques
- Temperature control
- Thin-film gas sensors
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering