Theory and experiments on r.f. sputtered tin oxide thin-films for gas sensing applications

Zhenan Tang, Guoping Jiang, Philip Ching Ho Chan, Johnny K.O. Sin, Silvanus S. Lau

Research output: Journal article publicationJournal articleAcademic researchpeer-review

21 Citations (Scopus)

Abstract

Material and gas sensing properties of tin oxide thin-films are described in this paper. The thin-films are prepared by r.f. sputtering using tin dioxide target and tin metal target under different sputtering conditions. Rutherford back scattering (RBS) was used to analyze the concentrations of Sn4+and Sn2+species in the sputtered thin-films. The gas sensing properties of the thin-films are interpreted according to the concentration of Sn4+and Sn2+and a mutual transition model.
Original languageEnglish
Pages (from-to)161-164
Number of pages4
JournalSensors and Actuators, B: Chemical
Volume43
Issue number1-3
DOIs
Publication statusPublished - 1 Jan 1997
Externally publishedYes

Keywords

  • Gas
  • Thin-films
  • Tin oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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