TY - GEN
T1 - Theoretical Modelling of Subsurface Damage in Ultra-Precision Grinding of Fused Silica
AU - Zhang, Fan
AU - Xiao, Huapan
AU - Cheung, Chi Fai
AU - Wang, Chunjin
N1 - Funding Information:
ACKNOWLEDGMENT
The work described in this paper was mainly supported by a grant from the Innovation and Technology Commission of the Government of the Hong Kong Special Administrative Region, China (Project No. GHP/142/19SZ) and the research studentships from the Research Committee of The Hong Kong Polytechnic University (Project codes: RH5Q).
Publisher Copyright:
© 2022 IEEE.
PY - 2022/8
Y1 - 2022/8
N2 - Fused silica is a typically brittle material with high hardness and low fracture toughness. Ultra-precision grinding technology is an effective method to improve the machinability of fused silica with high surface quality. To achieve low damage grinding of fused silica, the grinding performance with different grinding parameters was investigated and the material removal mode was also presented after determining the critical cutting depth. The subsurface microcrack was analyzed using indentation fracture mechanics, and a mathematical relationship model between the subsurface damage depth hSSD and the maximum height of surface roughness Sz was established. The relatively optimum surface quality of Sz=1.986 μm and subsurface damage depth hSSD=2.65 μm was achieved. The theoretical values of the established model were found to agree well with the actual measured values, which indicates that the model can be used for non-destructive detection of subsurface damage depth.
AB - Fused silica is a typically brittle material with high hardness and low fracture toughness. Ultra-precision grinding technology is an effective method to improve the machinability of fused silica with high surface quality. To achieve low damage grinding of fused silica, the grinding performance with different grinding parameters was investigated and the material removal mode was also presented after determining the critical cutting depth. The subsurface microcrack was analyzed using indentation fracture mechanics, and a mathematical relationship model between the subsurface damage depth hSSD and the maximum height of surface roughness Sz was established. The relatively optimum surface quality of Sz=1.986 μm and subsurface damage depth hSSD=2.65 μm was achieved. The theoretical values of the established model were found to agree well with the actual measured values, which indicates that the model can be used for non-destructive detection of subsurface damage depth.
KW - fused silica
KW - subsurface damage depth
KW - surface roughness
KW - theoretical modelling
KW - ultra-precision grinding
UR - http://www.scopus.com/inward/record.url?scp=85160547695&partnerID=8YFLogxK
U2 - 10.1109/Nanoman-AETS56035.2022.10119504
DO - 10.1109/Nanoman-AETS56035.2022.10119504
M3 - Conference article published in proceeding or book
AN - SCOPUS:85160547695
T3 - nanoMan 2022 and AETS 2022 - 2022 8th International Conference on Nanomanufacturing and 4th AET Symposium on ACSM and Digital Manufacturing
BT - nanoMan 2022 and AETS 2022 - 2022 8th International Conference on Nanomanufacturing and 4th AET Symposium on ACSM and Digital Manufacturing (Nanoman-AETS)
A2 - Xie, Wenkun
A2 - Liu, Qi
A2 - Wang, Zhengjian
A2 - Luo, Xichun
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 8th International Conference on Nanomanufacturing and 4th AET Symposium on ACSM and Digital Manufacturing, nanoMan 2022 and AETS 2022
Y2 - 30 August 2022 through 1 September 2022
ER -