Theoretical and experimental evaluation of surface quality for optical freeform surfaces

L. B. Kong, Chi Fai Cheung, D. Gao, Wing Bun Lee, Suet To

Research output: Journal article publicationJournal articleAcademic researchpeer-review

2 Citations (Scopus)

Abstract

Optical freeform surfaces have become indispensable in the products of photonics and telecommunication. Due to the geometrical complexity and optical particularity, it is difficult to test and evaluate the surface quality of optical freeform surfaces in terms of the form accuracy and surface finish. This paper presents a surface metrology model for the evaluation of surface quality of the optical freeform surfaces. The model is built based on a freeform surface-matching algorithm using the five-points-position-fixed, layered-step, and multilevel method with the match precision higher than 1 nm. Some parameters are also proposed for evaluating the surface quality of the freeform surfaces. The model is validated through a series of simulation and actual measurement experiments. The theoretical results agree well with the experimental results.
Original languageEnglish
Pages (from-to)1439-1448
Number of pages10
JournalProceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
Volume220
Issue number9
DOIs
Publication statusPublished - 1 Dec 2006

Keywords

  • Form evaluation
  • Matching
  • Optical freeform surface
  • Surface metrology
  • Ultra-precision machining

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

Cite this