The surface softening mechanism of AlN ceramic by laser treatment

Lingda Xiong; Chunjin Wang; Wei Wu; Linjiang Xu; Chunming Wang; Hui Deng; Chi Fai Cheung

doi:10.1016/j.surfin.2024.104023

The surface softening mechanism of AlN ceramic by laser treatment

Lingda Xiong, Chunjin Wang (Corresponding Author), Wei Wu, Linjiang Xu, Chunming Wang, Hui Deng, Chi Fai Cheung (Corresponding Author)

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

Aluminum Nitride ceramic is an excellent material for heat dissipation in electronic applications. The precision machining of AlN ceramic is difficult due to its high hardness and brittleness. To improve the machinability of the ceramic material, a microsecond laser was applied to soften the surface of AlN ceramic in this work. To reveal the surface softening mechanism of the laser processing of AlN ceramic, the phase composition, microstructure, processing depth and hardness variation of laser-treated AlN ceramic surface were studied. The phase transition and surface morphology evolution during laser treatment were explained. It was found that Al and Al₂O₃ were formed on the surface after laser treatment. The surface hardness decreased from 14.3 GPa (base material) to 0.708 GPa. The revealed surface softening mechanism of laser treatment in this work is helpful for the optimization of the softening process and post-machining quality.

Original language	English
Article number	104023
Journal	Surfaces and Interfaces
Volume	46
DOIs	https://doi.org/10.1016/j.surfin.2024.104023
Publication status	Published - Mar 2024

Keywords

AlN ceramic
Hardness variation
Laser
Phase transition
Surface softening mechanism

ASJC Scopus subject areas

Surfaces, Coatings and Films

More information

10.1016/j.surfin.2024.104023

Cite this

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title = "The surface softening mechanism of AlN ceramic by laser treatment",

abstract = "Aluminum Nitride ceramic is an excellent material for heat dissipation in electronic applications. The precision machining of AlN ceramic is difficult due to its high hardness and brittleness. To improve the machinability of the ceramic material, a microsecond laser was applied to soften the surface of AlN ceramic in this work. To reveal the surface softening mechanism of the laser processing of AlN ceramic, the phase composition, microstructure, processing depth and hardness variation of laser-treated AlN ceramic surface were studied. The phase transition and surface morphology evolution during laser treatment were explained. It was found that Al and Al2O3 were formed on the surface after laser treatment. The surface hardness decreased from 14.3 GPa (base material) to 0.708 GPa. The revealed surface softening mechanism of laser treatment in this work is helpful for the optimization of the softening process and post-machining quality.",

keywords = "AlN ceramic, Hardness variation, Laser, Phase transition, Surface softening mechanism",

author = "Lingda Xiong and Chunjin Wang and Wei Wu and Linjiang Xu and Chunming Wang and Hui Deng and Cheung, {Chi Fai}",

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year = "2024",

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doi = "10.1016/j.surfin.2024.104023",

language = "English",

volume = "46",

journal = "Surfaces and Interfaces",

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TY - JOUR

T1 - The surface softening mechanism of AlN ceramic by laser treatment

AU - Xiong, Lingda

AU - Wang, Chunjin

AU - Wu, Wei

AU - Xu, Linjiang

AU - Wang, Chunming

AU - Deng, Hui

AU - Cheung, Chi Fai

PY - 2024/3

Y1 - 2024/3

N2 - Aluminum Nitride ceramic is an excellent material for heat dissipation in electronic applications. The precision machining of AlN ceramic is difficult due to its high hardness and brittleness. To improve the machinability of the ceramic material, a microsecond laser was applied to soften the surface of AlN ceramic in this work. To reveal the surface softening mechanism of the laser processing of AlN ceramic, the phase composition, microstructure, processing depth and hardness variation of laser-treated AlN ceramic surface were studied. The phase transition and surface morphology evolution during laser treatment were explained. It was found that Al and Al2O3 were formed on the surface after laser treatment. The surface hardness decreased from 14.3 GPa (base material) to 0.708 GPa. The revealed surface softening mechanism of laser treatment in this work is helpful for the optimization of the softening process and post-machining quality.

AB - Aluminum Nitride ceramic is an excellent material for heat dissipation in electronic applications. The precision machining of AlN ceramic is difficult due to its high hardness and brittleness. To improve the machinability of the ceramic material, a microsecond laser was applied to soften the surface of AlN ceramic in this work. To reveal the surface softening mechanism of the laser processing of AlN ceramic, the phase composition, microstructure, processing depth and hardness variation of laser-treated AlN ceramic surface were studied. The phase transition and surface morphology evolution during laser treatment were explained. It was found that Al and Al2O3 were formed on the surface after laser treatment. The surface hardness decreased from 14.3 GPa (base material) to 0.708 GPa. The revealed surface softening mechanism of laser treatment in this work is helpful for the optimization of the softening process and post-machining quality.

KW - AlN ceramic

KW - Hardness variation

KW - Laser

KW - Phase transition

KW - Surface softening mechanism

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U2 - 10.1016/j.surfin.2024.104023

DO - 10.1016/j.surfin.2024.104023

M3 - Journal article

AN - SCOPUS:85184596772

SN - 2468-0230

VL - 46

JO - Surfaces and Interfaces

JF - Surfaces and Interfaces

M1 - 104023

ER -

The surface softening mechanism of AlN ceramic by laser treatment

Abstract

Keywords

ASJC Scopus subject areas

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