The study of LIGA technique at NSRL

Y. Tian, Y. Hong, S. Fu, Y. Hu, Y. Kan, X. Tao

    Research output: Journal article publicationJournal articleAcademic researchpeer-review


    The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated recently. The mask used in experiments was made by ourselves, it is a composite of kapton membrane as a mask blank, and gold as an absorber.

    Original languageEnglish
    Pages (from-to)171-173
    Number of pages3
    JournalMicrosystem Technologies
    Issue number4
    Publication statusPublished - Oct 1996

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Hardware and Architecture
    • Electrical and Electronic Engineering


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