The study of LIGA technique at NSRL

Y. Tian; Y. Hong; S. Fu; Y. Hu; Y. Kan; X. Tao

doi:10.1007/s005420050038

The study of LIGA technique at NSRL

Y. Tian, Y. Hong, S. Fu, Y. Hu, Y. Kan, X. Tao

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated recently. The mask used in experiments was made by ourselves, it is a composite of kapton membrane as a mask blank, and gold as an absorber.

Original language	English
Pages (from-to)	171-173
Number of pages	3
Journal	Microsystem Technologies
Volume	2
Issue number	4
DOIs	https://doi.org/10.1007/s005420050038
Publication status	Published - Oct 1996

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Hardware and Architecture
Electrical and Electronic Engineering

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10.1007/s005420050038

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The study of LIGA technique at NSRL

Abstract

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