The study of LIGA technique at NSRL

Y. Tian, Y. Hong, S. Fu, Y. Hu, Y. Kan, Xiaoming Tao

Research output: Journal article publicationJournal articleAcademic researchpeer-review

Abstract

The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated recently. The mask used in experiments was made by ourselves, it is a composite of kapton membrane as a mask blank, and gold as an absorber.
Original languageEnglish
Pages (from-to)171-173
Number of pages3
JournalMicrosystem Technologies
Volume2
Issue number1
DOIs
Publication statusPublished - 1 Mar 1995
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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