The study of LIGA technique at NSRL

Y. Tian; Y. Hong; S. Fu; Y. Hu; Y. Kan; Xiaoming Tao

doi:10.1007/BF02739553

The study of LIGA technique at NSRL

Y. Tian, Y. Hong, S. Fu, Y. Hu, Y. Kan, Xiaoming Tao

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated recently. The mask used in experiments was made by ourselves, it is a composite of kapton membrane as a mask blank, and gold as an absorber.

Original language	English
Pages (from-to)	171-173
Number of pages	3
Journal	Microsystem Technologies
Volume	2
Issue number	1
DOIs	https://doi.org/10.1007/BF02739553
Publication status	Published - 1 Mar 1995
Externally published	Yes

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

More information

10.1007/BF02739553

Cite this

@article{e76908f0d3a04e38be3388481b977cc2,

title = "The study of LIGA technique at NSRL",

abstract = "The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated recently. The mask used in experiments was made by ourselves, it is a composite of kapton membrane as a mask blank, and gold as an absorber.",

author = "Y. Tian and Y. Hong and S. Fu and Y. Hu and Y. Kan and Xiaoming Tao",

year = "1995",

month = mar,

day = "1",

doi = "10.1007/BF02739553",

language = "English",

volume = "2",

pages = "171--173",

journal = "Microsystem Technologies",

issn = "0946-7076",

publisher = "Springer Verlag",

number = "1",

}

TY - JOUR

T1 - The study of LIGA technique at NSRL

AU - Tian, Y.

AU - Hong, Y.

AU - Fu, S.

AU - Hu, Y.

AU - Kan, Y.

AU - Tao, Xiaoming

PY - 1995/3/1

Y1 - 1995/3/1

N2 - The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated recently. The mask used in experiments was made by ourselves, it is a composite of kapton membrane as a mask blank, and gold as an absorber.

AB - The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated recently. The mask used in experiments was made by ourselves, it is a composite of kapton membrane as a mask blank, and gold as an absorber.

UR - http://www.scopus.com/inward/record.url?scp=51649140847&partnerID=8YFLogxK

U2 - 10.1007/BF02739553

DO - 10.1007/BF02739553

M3 - Journal article

SN - 0946-7076

VL - 2

SP - 171

EP - 173

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 1

ER -

The study of LIGA technique at NSRL

Abstract

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this