The properties of multi-layered Pt/(Ba0.5Sr0.5) TiO3/Pb(Zr0.52Ti0.48)O3/(Ba0.5Sr0.5)TiO3/Pt capacitors

Feng Yan, Peng Bao, Jinsong Zhu, Yening Wang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

Abstract

Multi-layered Pt/(Ba0.5Sr0.5)TiO3/ Pb(Zr0.52Ti0.48)O3/ (Ba0.5Sr0.5)TiO3/Pt (Pt/BST/PZT/BST/Pt) thin films with different thickness of the BST layer were prepared by the pulsed laser deposition method. The introduction of a BST layer between PZT and Ft electrode can greatly improve the fatigue properties of the PZT capacitor. However, the hetero structure with the thicker BST layer exhibits slimmer hysteresis loop because lower electric field applied on the PZT layer. A hetero structure with a very thin BST layer (thickness ∼7.5nm) has a high remnant polarization and rare fatigue resistance after 1010switching cycles. We attribute the effect of BST layer on the fatigue properties to absorbing the oxygen vacancies in the PZT layer.
Original languageEnglish
Pages (from-to)197-204
Number of pages8
JournalIntegrated Ferroelectrics
Volume46
DOIs
Publication statusPublished - 1 Jan 2002
Externally publishedYes

Keywords

  • Ferroelectric properties
  • Multi-layered BST/PZT capacitor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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