Abstract
Multi-layered Pt/(Ba0.5Sr0.5)TiO3/ Pb(Zr0.52Ti0.48)O3/ (Ba0.5Sr0.5)TiO3/Pt (Pt/BST/PZT/BST/Pt) thin films with different thickness of the BST layer were prepared by the pulsed laser deposition method. The introduction of a BST layer between PZT and Ft electrode can greatly improve the fatigue properties of the PZT capacitor. However, the hetero structure with the thicker BST layer exhibits slimmer hysteresis loop because lower electric field applied on the PZT layer. A hetero structure with a very thin BST layer (thickness ∼7.5nm) has a high remnant polarization and rare fatigue resistance after 1010switching cycles. We attribute the effect of BST layer on the fatigue properties to absorbing the oxygen vacancies in the PZT layer.
Original language | English |
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Pages (from-to) | 197-204 |
Number of pages | 8 |
Journal | Integrated Ferroelectrics |
Volume | 46 |
DOIs | |
Publication status | Published - 1 Jan 2002 |
Externally published | Yes |
Keywords
- Ferroelectric properties
- Multi-layered BST/PZT capacitor
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry