The lateral instability problem in electrostatic comb drive actuators: Modeling and feedback control

Comb drives inherently suffer from electromechanical instability called lateral pull-in, side pull-in or, sometimes, lateral instability. Although fabricated to be perfectly symmetrical, the actuator's comb structure is always unbalanced, causing adjacent finger electrodes to contact each other when voltage-deflection conditions are favorable. Lateral instability decreases the active traveling range of the actuator, and the problem is typically approached by improving the mechanical design of the suspension. In this paper, a novel approach to counteracting the pull-in phenomenon is proposed. It is shown that the pull-in problem can be successfully counteracted by introducing active feedback steering of the lateral motion. In order to do this, however, the actuator must be controllable in the lateral direction, and lateral deflection measurements need to be available. It is shown herein how to accomplish this. The experimentally verified dynamic model of the comb drive is extended with a lateral motion model. The lateral part of the model is verified through experimental results and finite element analysis and is hypothetically extended to accommodate both sensor and actuator functionalities for lateral movement. A set of simulations is performed to illustrate the improved traveling range gained by the controller.