The Investigation of an Integrated Gas Sensor Array

Keyphrases

• Integrated Gas Sensor 100%
• Gas Sensor Array 100%
• SnO2 Film 100%
• Artificial Neural Network 50%
• Sensor Array 50%
• Temperature Sensor 50%
• Four Elements 50%
• Surface Micromachining 50%
• Machining Technology 50%
• Independently Controllable 50%
• Electronic Nose (E-nose) 50%
• Separate-heater 50%
• Micro-integrated 50%

Engineering

• Gas Sensor 100%
• Sensor Array 100%
• Surface Micro-Machining 33%
• Thermal Sensor 33%
• Electronic Nose 33%
• Artificial Neural Network 33%