The Investigation of an Integrated Gas Sensor Array

Guizhen Yan; Philip Ching Ho Chan; Min Miao; Johnny K.O. Sin; I. Ming Hsing

The Investigation of an Integrated Gas Sensor Array

Guizhen Yan, Philip Ching Ho Chan, Min Miao, Johnny K.O. Sin, I. Ming Hsing

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

A micro integrated gas sensor array has been designed and fabricated with surface micro-machining technology. The sensor array consists of four elements integrated on a chip. Two different kinds of SnO2film were sputtered on the four sensors. Au and Pt were deposited on the surface of SnO2film as catalysts. The four sensors can be independently controlled by separate heater and temperature sensor. When implementing the function of electronic nose, the array can well differentiate CO, NO2and H2S and measure the concentration of each gas without the analysis of artificial neural network.

Original language	English
Title of host publication	Proceedings of IEEE Sensors
Pages	343
Number of pages	1
Publication status	Published - 1 Dec 2002
Externally published	Yes
Event	First IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States Duration: 12 Jun 2002 → 14 Jun 2002

Conference

Conference	First IEEE International Conference on Sensors - IEEE Sensors 2002
Country/Territory	United States
City	Orlando, FL
Period	12/06/02 → 14/06/02

Keywords

Gas sensors
Sensor array
SnO 2

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

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title = "The Investigation of an Integrated Gas Sensor Array",

abstract = "A micro integrated gas sensor array has been designed and fabricated with surface micro-machining technology. The sensor array consists of four elements integrated on a chip. Two different kinds of SnO2film were sputtered on the four sensors. Au and Pt were deposited on the surface of SnO2film as catalysts. The four sensors can be independently controlled by separate heater and temperature sensor. When implementing the function of electronic nose, the array can well differentiate CO, NO2and H2S and measure the concentration of each gas without the analysis of artificial neural network.",

keywords = "Gas sensors, Sensor array, SnO 2",

author = "Guizhen Yan and Chan, {Philip Ching Ho} and Min Miao and Sin, {Johnny K.O.} and Hsing, {I. Ming}",

year = "2002",

month = dec,

day = "1",

language = "English",

pages = "343",

booktitle = "Proceedings of IEEE Sensors",

note = "First IEEE International Conference on Sensors - IEEE Sensors 2002 ; Conference date: 12-06-2002 Through 14-06-2002",

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AU - Yan, Guizhen

AU - Chan, Philip Ching Ho

AU - Miao, Min

AU - Sin, Johnny K.O.

AU - Hsing, I. Ming

PY - 2002/12/1

Y1 - 2002/12/1

N2 - A micro integrated gas sensor array has been designed and fabricated with surface micro-machining technology. The sensor array consists of four elements integrated on a chip. Two different kinds of SnO2film were sputtered on the four sensors. Au and Pt were deposited on the surface of SnO2film as catalysts. The four sensors can be independently controlled by separate heater and temperature sensor. When implementing the function of electronic nose, the array can well differentiate CO, NO2and H2S and measure the concentration of each gas without the analysis of artificial neural network.

AB - A micro integrated gas sensor array has been designed and fabricated with surface micro-machining technology. The sensor array consists of four elements integrated on a chip. Two different kinds of SnO2film were sputtered on the four sensors. Au and Pt were deposited on the surface of SnO2film as catalysts. The four sensors can be independently controlled by separate heater and temperature sensor. When implementing the function of electronic nose, the array can well differentiate CO, NO2and H2S and measure the concentration of each gas without the analysis of artificial neural network.

KW - Gas sensors

KW - Sensor array

KW - SnO 2

UR - http://www.scopus.com/inward/record.url?scp=1542331716&partnerID=8YFLogxK

M3 - Conference article published in proceeding or book

SP - 343

BT - Proceedings of IEEE Sensors

T2 - First IEEE International Conference on Sensors - IEEE Sensors 2002

Y2 - 12 June 2002 through 14 June 2002

ER -

The Investigation of an Integrated Gas Sensor Array

Abstract

Conference

Keywords

ASJC Scopus subject areas

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