The Investigation of an Integrated Gas Sensor Array

Guizhen Yan, Philip Ching Ho Chan, Min Miao, Johnny K.O. Sin, I. Ming Hsing

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

A micro integrated gas sensor array has been designed and fabricated with surface micro-machining technology. The sensor array consists of four elements integrated on a chip. Two different kinds of SnO2film were sputtered on the four sensors. Au and Pt were deposited on the surface of SnO2film as catalysts. The four sensors can be independently controlled by separate heater and temperature sensor. When implementing the function of electronic nose, the array can well differentiate CO, NO2and H2S and measure the concentration of each gas without the analysis of artificial neural network.
Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
Pages343
Number of pages1
Publication statusPublished - 1 Dec 2002
Externally publishedYes
EventFirst IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States
Duration: 12 Jun 200214 Jun 2002

Conference

ConferenceFirst IEEE International Conference on Sensors - IEEE Sensors 2002
CountryUnited States
CityOrlando, FL
Period12/06/0214/06/02

Keywords

  • Gas sensors
  • Sensor array
  • SnO 2

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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