The fabrication of high filling factor double side micro lens array with high alignment accuracy

Yuan Chieh Cheng, Chun Chieh Chen, Wei Yao Hsu, Pei Jen Wang, Din Ping Tsai

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

1 Citation (Scopus)


The high filling factor double side micro lens array (MLA) for laser beam shaping has been widely applied in optoelectrical applications. In this paper, we demonstrated the double side MLA for the laser beam shaping process. The point laser source has been successfully transformed into a two dimension uniformity light imaging. The ultra-precision slow tool servo (STS) diamond shaping and plastic injection method for MLA fabrication had been studied. The complexity micro structure of high filling factor MLA via the planning of cutting tool path is used in this research. The high alignment accuracy of both sides MLA is obtained by artful fixture design. The form accuracy and surface roughness are less than 0.1μm and 10nm, respectively. The alignment error of both sides MLA is less than 10μm.

Original languageEnglish
Title of host publicationOptical Manufacturing and Testing IX
Publication statusPublished - Aug 2011
Externally publishedYes
EventOptical Manufacturing and Testing IX - San Diego, CA, United States
Duration: 22 Aug 201124 Aug 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceOptical Manufacturing and Testing IX
Country/TerritoryUnited States
CitySan Diego, CA


  • Double side micro lens array
  • High filling factor
  • Laser beam shaping
  • Slow tool servo diamond shaping

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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