The double bend filtered cathodic arc technology and its applications

X. Shi, B. K. Tay, Shu Ping Lau

Research output: Journal article publicationJournal articleAcademic researchpeer-review

73 Citations (Scopus)

Abstract

A new Filtered Catholic Vacuum Arc coating system with a magnetic a macroparticle filter design consisting of an off-plane double-bend (OPDB) filter is described. The transport of the bacuum 'arc plasma through this OPDB filter is investigated using Langmuir and deposition probes. Films of amorphous hard carbon have been deposited using a 90°single brad and the OPDB filter and the macroparticle contents of the films are compared. The experimental results were found to be in good agreement with the similations results based on an improved drift approximation model. The results demonstrate that OPDB filter has a relatively better transmission efficiency than the 90°single bend filter, lower macroparticle counts and is suitable for preparation of diamond-like carbon coatings with high quality. Some important applications of the ta-C coating produced by using the new FCVA system have been identified and where applicable industrial testing results ate presented.
Original languageEnglish
Pages (from-to)136-153
Number of pages18
JournalInternational Journal of Modern Physics B
Volume14
Issue number2-3
Publication statusPublished - 30 Jan 2000
Externally publishedYes

ASJC Scopus subject areas

  • Statistical and Nonlinear Physics
  • Condensed Matter Physics

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