@article{ef062b21108b4e7cb6232adaf94ac275,
title = "Technique for preventing stiction and notching effect on silicon-on-insulator microstructure",
author = "J. Li and Zhang, \{Q. X.\} and Liu, \{A. Q.\} and Goh, \{W. L.\} and J. Ahn",
year = "2003",
month = nov,
doi = "10.1116/1.1623509",
language = "English",
volume = "21",
pages = "2530--2539",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}