System identification and vibration control of a piezo-driven flexure-based xyz parallel micropositioning stage

Yangmin Li, Qingsong Xu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

This paper presents experimental investigations on vibration control of a piezo-driven micropositioning stage aiming at a submicron-Accuracy motion tracking. The stage has decoupled XYZ translationalmotions and is featured with flexure hinges and parallel kinematics. The flexure structure renders the stage a lightly damped resonant mode, and the stack piezoelectric actuator (PZT) introduces hysteresis behavior into the system. The obtained frequency responses of the system confirm the decoupled property of the stage, which allows the adoption of single- input-single-output (SISO) control strategy for each of the three axes. A low-pass filter is employed to reduce the noise level and an integral resonant control (IRC) scheme is adopted to damp the resonant mode. An additional high-gain integral feedback control is implemented to alleviate the hysteresis effects and to achieve a suitable bandwidth with sufficient stability margin. The effectiveness of the combined controller is verified by extensive simulation and experimental studies. Results show that the ad- verse vibration, hysteresis and noise of the piezo-driven stage are well attenuated, which validates the effectiveness of the presented control scheme.
Original languageEnglish
Title of host publicationASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
Pages345-353
Number of pages9
Volume10
DOIs
Publication statusPublished - 1 Dec 2010
Externally publishedYes
EventASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010 - Vancouver, BC, Canada
Duration: 12 Nov 201018 Nov 2010

Conference

ConferenceASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
Country/TerritoryCanada
CityVancouver, BC
Period12/11/1018/11/10

ASJC Scopus subject areas

  • Mechanical Engineering

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