Synthesis of superhard and elastic carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source

Y. H. Cheng, B. K. Tay, Shu Ping Lau, X. Shi, X. L. Qiao, J. G. Chen, Y. P. Wu, Z. H. Sun, C. S. Xie

Research output: Journal article publicationJournal articleAcademic researchpeer-review

22 Citations (Scopus)

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Engineering

Material Science