Abstract
The transient drain current of the single grain silicon TFTs with ECR-PECVD gate oxide has been measured. Switch-on undershoot current has been observed, which can be attributed to the motion of space charge in gate oxide.
Original language | English |
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Title of host publication | Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05 |
Pages | 456-458 |
Number of pages | 3 |
Publication status | Published - 1 Dec 2005 |
Externally published | Yes |
Event | International Display Manufacturing Conference and Exhibition, IDMC'05 - Taipei, Japan Duration: 21 Feb 2005 → 24 Feb 2005 |
Conference
Conference | International Display Manufacturing Conference and Exhibition, IDMC'05 |
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Country/Territory | Japan |
City | Taipei |
Period | 21/02/05 → 24/02/05 |
ASJC Scopus subject areas
- General Engineering