Sub-wavelength GaN-based membrane high contrast grating reflectors

T.T. Wu, Y.C. Syu, S.H. Wu, W.T. Chen, T.C. Lu, S.C. Wang, H.P. Chiang, Din-ping Tsai

Research output: Journal article publicationJournal articleAcademic researchpeer-review

40 Citations (Scopus)

Abstract

The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region. © 2012 Optical Society of America.
Original languageEnglish
Pages (from-to)20551-20557
Number of pages7
JournalOptics Express
Volume20
Issue number18
DOIs
Publication statusPublished - 27 Aug 2012
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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